Invention Grant
- Patent Title: Method for dividing a composite into semiconductor chips, and semiconductor chip
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Application No.: US15845883Application Date: 2017-12-18
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Publication No.: US10232471B2Publication Date: 2019-03-19
- Inventor: Mathias Kaempf
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee Address: DE Regensburg
- Agency: McDermott Will & Emery LLP
- Priority: DE102013108583 20130808
- Main IPC: H01L23/544
- IPC: H01L23/544 ; B23K26/53 ; B23K26/38 ; B23K26/40 ; H01L21/268 ; H01L21/683 ; H01L21/78 ; H01L33/00 ; B23K101/40 ; B23K103/00

Abstract:
The invention relates to a method for dividing a composite into a plurality of semiconductor chips along a dividing pattern. A composite, which comprises a substrate, a semiconductor layer sequence, and a functional layer, is provided. Separating trenches are formed in the substrate along the dividing pattern. The functional layer is cut through along the dividing pattern by means of coherent radiation. Each divided semiconductor chip has part of the semiconductor layer sequence, part of the substrate, and part of the functional layer. The invention further relates to a semiconductor chip.
Public/Granted literature
- US20180117706A1 METHOD FOR DIVIDING A COMPOSITE INTO SEMICONDUCTOR CHIPS, AND SEMICONDUCTOR CHIP Public/Granted day:2018-05-03
Information query
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