Invention Grant
- Patent Title: Method for forming filter net on MEMS sensor and MEMS sensor
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Application No.: US15739913Application Date: 2017-03-03
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Publication No.: US10233075B2Publication Date: 2019-03-19
- Inventor: Junkai Zhan , Zonglin Zhou , Guanxun Qiu , Mengjin Cai
- Applicant: Goertek Inc.
- Applicant Address: CN Shandong
- Assignee: Goertek Inc.
- Current Assignee: Goertek Inc.
- Current Assignee Address: CN Shandong
- Agency: Alston & Bird LLP
- Priority: CN201611041741 20161122
- International Application: PCT/CN2017/075595 WO 20170303
- International Announcement: WO2018/094905 WO 20180531
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; B81C3/00

Abstract:
A method for forming a filter net on an MEMS sensor and an MEMS sensor are disclosed. The method comprises the following steps: disposing a dissociable adhesive tape on a base material, and forming a filter net on an adhesive surface of the dissociable adhesive tape; transferring the filter net on a film to form a self-adhesive coiled material; and transferring and adhering the filter net on the self-adhesive coiled material to collecting a hole of the MEMS sensor. The filter net formed by the method have fine and uniform meshes, and a yield is high. In addition, the method is suitable for large-scale and industrialized production.
Public/Granted literature
- US20180362331A1 METHOD FOR FORMING FILTER NET ON MEMS SENSOR AND MEMS SENSOR Public/Granted day:2018-12-20
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