Infrared microscope
Abstract:
The problem to be solved by the present invention is to provide an infrared microscope with good measuring accuracy and less crosstalk.The infrared microscope 10 comprises a light source 12, an irradiating unit 14 for irradiating the infrared light from the light source to a sample 16, a focusing unit 18 for focusing the infrared light transmitted through or reflected by the sample 16, and a detector 20 for detecting the focused infrared light. The irradiating unit 14 comprises a first aperture 24, and the first aperture is disposed at a position where the infrared light from the light source passes therethrough. The focusing unit 18 comprises a second aperture 30, and the second aperture is disposed at an imaging position of the infrared light at the first aperture 24. The first aperture has a plurality of holes, and the holes are disposed at intervals corresponding to the arrangement of the light-receiving elements provided in the detector 20 to detect the infrared light as a detecting light. The second aperture 30 has holes that have the same size and arrangement as the first aperture 24.
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