- Patent Title: Device and method for processing a radiation beam with coherence
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Application No.: US15660498Application Date: 2017-07-26
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Publication No.: US10234767B2Publication Date: 2019-03-19
- Inventor: Sebastianus Adrianus Goorden , Nitesh Pandey , Duygu Akbulut , Teunis Willem Tukker , Johannes Matheus Marie De Wit
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP16182256 20160801
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01N21/88 ; G01N21/95 ; G02B6/26 ; G02B6/42

Abstract:
Devices and methods for processing a radiation beam with coherence are disclosed. In one arrangement, an optical system receives a radiation beam with coherence. The radiation beam comprises components distributed over one or more radiation beam spatial modes. A waveguide supports a plurality of waveguide spatial modes. The optical system directs a plurality of the components of the radiation beam belonging to a common radiation beam spatial mode and having different frequencies onto the waveguide in such a way that each of the plurality of components couples to a different set of the waveguide spatial modes, each set comprising one or more of the waveguide spatial modes.
Public/Granted literature
- US20180031977A1 Device and Method for Processing a Radiation Beam with Coherence Public/Granted day:2018-02-01
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