Invention Grant
- Patent Title: Charged particle beam apparatus
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Application No.: US15448308Application Date: 2017-03-02
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Publication No.: US10236159B2Publication Date: 2019-03-19
- Inventor: Satoshi Tomimatsu , Makoto Sato , Atsushi Uemoto , Tatsuya Asahata , Yo Yamamoto
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2014-176241 20140829; JP2015-030458 20150219; JP2015-161811 20150819
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/302

Abstract:
A charged particle beam includes: a computer that controls a needle actuating mechanism so as to approach a needle to a sample piece using a template formed from an absorbed current image obtained by irradiating the needle with a charged particle beam and a tip coordinate of the needle acquired from a secondary electron image obtained by irradiating the needle with the charged particle beam.
Public/Granted literature
- US20170178858A1 CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2017-06-22
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