- Patent Title: Micro heater, micro sensor and micro sensor manufacturing method
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Application No.: US15344672Application Date: 2016-11-07
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Publication No.: US10241094B2Publication Date: 2019-03-26
- Inventor: Bum Mo Ahn , Seung Ho Park , Sung Hyun Byun
- Applicant: Point Engineering Co., Ltd.
- Applicant Address: KR Asan-si, Chungcheongnam-do
- Assignee: Point Engineering Co., Ltd.
- Current Assignee: Point Engineering Co., Ltd.
- Current Assignee Address: KR Asan-si, Chungcheongnam-do
- Agency: Sunstein Kann Murphy & Timbers LLP
- Priority: KR10-2015-0158141 20151111
- Main IPC: G01N33/00
- IPC: G01N33/00 ; H05B3/06 ; H05B3/26 ; H05B3/03 ; G01N27/12
Abstract:
A micro heater includes a substrate formed of an anodized film and a heater electrode formed on the substrate and provided with a heat generation wiring line. The heat generation wiring line is formed in a laminated state. Also disclosed are a micro sensor and a micro sensor manufacturing method.
Public/Granted literature
- US20170131252A1 MICRO HEATER, MICRO SENSOR AND MICRO SENSOR MANUFACTURING METHOD Public/Granted day:2017-05-11
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