Invention Grant
- Patent Title: MEMs devices
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Application No.: US15953094Application Date: 2018-04-13
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Publication No.: US10244331B1Publication Date: 2019-03-26
- Inventor: James Thomas Deas , John Paul Lesso
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: WOPCT/GB2018/050976 20180412
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B7/00 ; H04R19/00

Abstract:
The present disclosure relates to a micro electro-mechanical system (MEMS) device comprising a fixed electrode, a moveable electrode that is moveable with respect to the fixed electrode and an output terminal for outputting a transducer output signal indicative of a capacitance between the fixed electrode and the moveable electrode. A package is provided which houses the fixed electrode and the moveable electrode, the package defining a first volume on a first side of the moveable electrode. The moveable electrode is moveable within the first volume in response to sound or pressure waves incident on the moveable electrode. A power dissipation element is disposed within the package. The power dissipation element is configured to receive a generated stimulus signal and to dissipate heat into the first volume so as to modulate the pressure of air within the first volume in accordance with the received generated stimulus signal.
Information query