- 专利标题: System and method for electrodeless plasma ignition in laser-sustained plasma light source
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申请号: US15280073申请日: 2016-09-29
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公开(公告)号: US10244613B2公开(公告)日: 2019-03-26
- 发明人: Anant Chimmalgi , Rudolf Brunner , Anatoly Shchemelinin , Ilya Bezel , Erik Kim , Rajeev Patil
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: A61N5/06
- IPC分类号: A61N5/06 ; H05G2/00 ; H01J65/04 ; G02B6/42 ; H01J61/02 ; H01J61/54
摘要:
An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.
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