Invention Grant
- Patent Title: Mode-matching of MEMS resonators
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Application No.: US15348521Application Date: 2016-11-10
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Publication No.: US10247600B2Publication Date: 2019-04-02
- Inventor: Youn-Jae Kook , Jose Barreiro Silva , Jianrong Chen , Ronald A. Kapusta, Jr.
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C19/5776
- IPC: G01C19/5776 ; G01C19/5726 ; G01H13/00 ; G01P15/00 ; G01P21/00

Abstract:
Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.
Public/Granted literature
- US20180128674A1 MODE-MATCHING OF MEMS RESONATORS Public/Granted day:2018-05-10
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