- 专利标题: Optical microresonator device with thermal isolation
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申请号: US15661725申请日: 2017-07-27
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公开(公告)号: US10247676B1公开(公告)日: 2019-04-02
- 发明人: Michael J. Shaw
- 申请人: National Technology & Engineering Solutions of Sandia, LLC
- 申请人地址: US NM Albuquerque
- 专利权人: National Technology & Engineering Solutions of Sandia, LLC
- 当前专利权人: National Technology & Engineering Solutions of Sandia, LLC
- 当前专利权人地址: US NM Albuquerque
- 代理机构: Capitol Patent & Trademark Law Firm
- 代理商 Martin I. Finston; Wendy W. Koba
- 主分类号: G01N21/77
- IPC分类号: G01N21/77 ; G02B6/02 ; G02B6/293 ; G02B6/024 ; G02B6/12 ; G01J5/44 ; G01J5/08 ; G01N21/68
摘要:
A thermal microring optical sensor is configured such that a portion of the optical resonator and its associated waveguide are encased within a cladding structure to minimize scattering losses along the waveguide and also provide improved evanescent coupling efficiency between the waveguide and the resonator. Functioning as a thermal sensor, incoming radiation modifies the temperature of the resonator, which changes its resonant frequency and, as a result, the percentage of light that it evanescently couples from the waveguide. The cladding structure also functions as a mechanical support for the resonator disk, eliminating the need for a pedestal to suspend the disk above the support substrate. Thermally-induced buckling of the optical waveguide is also reduced by encasing the susceptible portion of the waveguiding within the cladding structure.
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