Invention Grant
- Patent Title: Ion implanter and ion implantation method
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Application No.: US15937346Application Date: 2018-03-27
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Publication No.: US10249477B2Publication Date: 2019-04-02
- Inventor: Syuta Ochi , Shiro Ninomiya , Yuuji Takahashi , Tadanobu Kagawa
- Applicant: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2017-064492 20170329
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/223 ; H01J37/317

Abstract:
An ion implanter includes a plasma shower device configured to supply electrons to an ion beam with which a wafer is irradiated. The plasma shower device includes a plasma generating chamber provided with an extraction opening, a first electrode which is provided with an opening communicating with the extraction opening and to which a first voltage is applied with respect to an electric potential of the plasma generating chamber, a second electrode which is disposed at a position facing the first electrode such that the ion beam is interposed between the first and second electrodes and to which a second voltage is applied with respect to the electric potential of the plasma generating chamber, and a controller configured to independently control the first voltage and the second voltage to switch operation modes of the plasma shower device.
Public/Granted literature
- US20180286637A1 ION IMPLANTER AND ION IMPLANTATION METHOD Public/Granted day:2018-10-04
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