- 专利标题: Component manufacturing method and polishing apparatus
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申请号: US16048968申请日: 2018-07-30
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公开(公告)号: US10252393B2公开(公告)日: 2019-04-09
- 发明人: Takehiro Torikai , Hitoshi Hashizume
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2013-151650 20130722; JP2013-151651 20130722
- 主分类号: B24B13/02
- IPC分类号: B24B13/02 ; B24B13/005
摘要:
A component manufacturing method includes causing a holding member to hold a workpiece such that a spherical center of a processed surface of the workpiece is located on a supporting member; rotating the workpiece by rotating the holding member; and polishing the workpiece by moving the supporting member to move the workpiece on a polishing tool, with the spherical center of the processed surface located at a spherical center of a processing surface of the polishing tool.
公开/授权文献
- US20180333822A1 COMPONENT MANUFACTURING METHOD AND POLISHING APPARATUS 公开/授权日:2018-11-22
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