Invention Grant
- Patent Title: Carrier buffering device and buffering method
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Application No.: US15315345Application Date: 2015-04-30
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Publication No.: US10256129B2Publication Date: 2019-04-09
- Inventor: Kaname Takai
- Applicant: Murata Machinery, Ltd.
- Applicant Address: JP
- Assignee: Murata Machinery, Ltd.
- Current Assignee: Murata Machinery, Ltd.
- Current Assignee Address: JP
- Agency: DLA Piper LLP (US)
- Priority: JP2014-126014 20140619
- International Application: PCT/JP2015/062939 WO 20150430
- International Announcement: WO2015/194265 WO 20151223
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A temporary storage apparatus is provided with a slidable buffer which does not prevent installation of the apparatus and maintenance of equipment, has increased storing capacity for carriers without a lateral transfer mechanism in a local vehicle, stores carriers between overhead travelling vehicles and a load port, and is provided with the local vehicle travelling on a rail below the rail for the overhead travelling vehicles and a slidable buffer comprising a cell to support a carrier and a guide mechanism sliding the slidable buffer between an advanced position under the rail and a backward position laterally shifted from the rail. The guide mechanism moves between an active position laterally protruding from the rail and a retracted position allowing transfer by the overhead travelling vehicles between the load port. The rail extends along the front face of the equipment to a waiting position separated from a position over the port.
Public/Granted literature
- US20170186639A1 CARRIER BUFFERING DEVICE AND BUFFERING METHOD Public/Granted day:2017-06-29
Information query
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