Invention Grant
- Patent Title: Electrostatic holding device and method for the operation thereof, and charge transfer circuit
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Application No.: US15365365Application Date: 2016-11-30
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Publication No.: US10256130B2Publication Date: 2019-04-09
- Inventor: Peter Preuss , Gunnar Heinze , Michael Fall , Alexander Stein
- Applicant: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Applicant Address: DE Berlin
- Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee Address: DE Berlin
- Agency: Caesar Rivise, PC
- Priority: DE102015015765 20151204
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
An electrostatic holding device (100) for holding component (1) by electrostatic holding forces includes clamp carrier (10) which has electrode device (11) and is configured for receiving component (1), voltage source device (20) for provision of a source charge current for charging clamp carrier (10), source switching device (30) which is arranged for a switchable connection of voltage source device (20) with electrode device (11), and at least one charge storage device (40, 40A, 40B) which has storage capacitor (41, 41A, 41B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier (10) in storage capacitor (41, 41A, 41B) and provide a storage charge current for charging clamp carrier (10). Also described is a method for operating holding device (100) and transfer circuit (200) for transmitting charges from working capacitor (201) to storage capacitor (202).
Public/Granted literature
- US20170162414A1 ELECTROSTATIC HOLDING DEVICE AND METHOD FOR THE OPERATION THEREOF, AND CHARGE TRANSFER CIRCUIT Public/Granted day:2017-06-08
Information query
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