Invention Grant
- Patent Title: Integrated circuit devices having features with reduced edge curvature and methods for manufacturing the same
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Application No.: US15698552Application Date: 2017-09-07
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Publication No.: US10256293B2Publication Date: 2019-04-09
- Inventor: Victor Moroz , Lars Bomholt
- Applicant: Synopsys, Inc.
- Applicant Address: US CA Mountain View
- Assignee: Synopsys, Inc.
- Current Assignee: Synopsys, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L21/265 ; H01L21/306 ; H01L29/66
Abstract:
A structure such as an integrated circuit device is described having a line of material with critical dimensions which vary within a distribution substantially less than that of a mask element, such as a patterned resist element, used in manufacturing the line of material.
Public/Granted literature
Information query
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