Invention Grant
- Patent Title: Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator
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Application No.: US15194943Application Date: 2016-06-28
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Publication No.: US10256749B2Publication Date: 2019-04-09
- Inventor: Tomoaki Takahashi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-133503 20150702; JP2015-133550 20150702
- Main IPC: H02N2/02
- IPC: H02N2/02 ; H02N2/00 ; B25J9/12 ; B25J15/02 ; H02N2/10

Abstract:
The invention relates to a piezoelectric actuator including: a first piezoelectric vibrator including a first diaphragm and first piezoelectric elements that are provided on the first diaphragm and include a first electrode, a second electrode, and a piezoelectric material layer held by the first electrode and the second electrode; a second piezoelectric vibrator including a second diaphragm and second piezoelectric elements that are provided on the second diaphragm and include a first electrode, a second electrode, and a piezoelectric material layer held by the first electrode and the second electrode; and an inductor. The layout of the first piezoelectric vibrator in the first diaphragm is the same as the layout of the second piezoelectric vibrator in the second diaphragm. The positions of the first piezoelectric elements on the first diaphragm correspond to the positions of the second piezoelectric elements on the second diaphragm. The second electrode of the first piezoelectric elements corresponds to the second electrode of the second piezoelectric elements. The corresponding second electrodes are connected via the inductor.
Public/Granted literature
- US20170005596A1 PIEZOELECTRIC ACTUATOR, MOTOR, ROBOT, AND METHOD OF DRIVING PIEZOELECTRIC ACTUATOR Public/Granted day:2017-01-05
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