Raman spectrum-based object inspection apparatus and method
Abstract:
A Raman spectrum-based object inspection apparatus and a Raman spectrum-based object inspection method are disclosed. In one aspect, an example apparatus includes: a laser device configured to emit a laser; an optical guiding device configured to guide the laser to an object to be detected and collect a Raman scattering light from the object. The apparatus includes a spectrum generator configured to receive the Raman scattering light collected by the optical guiding device and generate a Raman spectroscopic signal. The spectrum analyzer is configured to analyze the Raman spectroscopic signal to obtain an inspection result. The apparatus includes a monitoring device configured to monitor a state of the object and control an object inspection operation depending on the state of the object.
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