Invention Grant
- Patent Title: Workpiece surface detection method and system using the same
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Application No.: US15392325Application Date: 2016-12-28
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Publication No.: US10261025B2Publication Date: 2019-04-16
- Inventor: Wei-Yao Chiu , Kuo-Feng Hung , Yu-Ting Lin , Keng-Hao Chang
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Chutung, Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Chutung, Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW105135933A 20161104
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N1/42

Abstract:
A detecting method for a workpiece surface includes the following steps. Firstly, a workpiece is provided with a first environment, wherein the first environment has a first environmental temperature higher than a first saturation temperature corresponding to an environmental-relative humidity. Then, the workpiece is provided with a second environment, wherein the second environment has a second environmental temperature lower than the first environmental temperature, such that a itself-temperature of the workpiece reduces to a mist temperature, wherein the mist temperature is substantially equal to or higher than the second environmental temperature. Then, the workpiece is provided with a mist environment, wherein the mist environment has a mist-saturation temperature corresponding to a mist-environmental relative humidity is equal to or higher than the mist temperature for misting a surface of the workpiece. Then, the surface of the misted workpiece is detected.
Public/Granted literature
- US20180128750A1 WORKPIECE SURFACE DETECTION METHOD AND SYSTEM USING THE SAME Public/Granted day:2018-05-10
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