发明授权
- 专利标题: Bonding device
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申请号: US15805714申请日: 2017-11-07
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公开(公告)号: US10262969B2公开(公告)日: 2019-04-16
- 发明人: Akio Sugito
- 申请人: KAIJO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: KAIJO CORPORATION
- 当前专利权人: KAIJO CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2014-098057 20140509
- 主分类号: B23K31/02
- IPC分类号: B23K31/02 ; H01L23/00 ; B23K20/00 ; B23K20/02 ; B23K20/10
摘要:
[Problem]To provide a bonding device capable of adequately controlling a leading end of a capillary when a ball formed at a leading end of a wire is pressed and bonded to an electrode of a semiconductor chip with scrub vibration.[Solution]The bonding device is provided with a vibration driving portion (7), the vibration driving portion (7) including a plurality of piezoelectric elements (10) that are expanded and contracted along an axial direction of a bonding arm (3) respectively with one end thereof fixed to a leading end of the bonding arm (3), a plurality of capillary holding portions (15) that are in contact respectively with a circumferential face of a capillary (20) at a base end side thereof as being fixed correspondingly to the other end of the piezoelectric elements (10), and a pressing-holding portion (21) that sandwiches the capillary (20) as pressing the capillary (20) to the capillary holding portions (15) with at least one end side fixed to the bonding arm (3) and the other end side being in contact with the circumferential face of the capillary (20) at the base end side thereof on a side opposite to the capillary holding portions (15). Here, functional operation of amplitude, phase, frequency, or waveform is performed on drive voltage waveform to the respective piezoelectric elements.
公开/授权文献
- US20180061803A1 BONDING DEVICE 公开/授权日:2018-03-01
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