Invention Grant
- Patent Title: Mask assembly for thin film deposition and method of manufacturing the same
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Application No.: US15630206Application Date: 2017-06-22
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Publication No.: US10266935B2Publication Date: 2019-04-23
- Inventor: Sangmin Yi
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2016-0079281 20160624
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/18 ; C23F1/00

Abstract:
A mask assembly for thin film deposition and a method of manufacturing the same. The mask assembly includes a glass mask having a first surface and a second surface opposite the first surface, a first metal layer patterned above the first surface of the glass mask, and a second metal layer patterned below the second surface of the glass mask. A plurality of deposition areas are arranged on the glass mask, and a plurality of deposition pattern portions each having a plurality of slits are patterned in the plurality of deposition areas.
Public/Granted literature
- US20170369983A1 MASK ASSEMBLY FOR THIN FILM DEPOSITION AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-12-28
Information query
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