Diaphragm, fluid control apparatus, and method of manufacturing diaphragm
Abstract:
A diaphragm having chemical resistance is disclosed. The diaphragm includes a membrane portion and a connection portion which enables connection of the membrane portion to another member. The membrane portion is formed of a first material having chemical resistance. The connection portion is formed of a second material whose main material is the same as that of the first material. The membrane portion and the connection portion are directly bonded together.
Information query
Patent Agency Ranking
0/0