- 专利标题: Measurement probe unit for metrology applications
-
申请号: US15127425申请日: 2015-04-08
-
公开(公告)号: US10267629B2公开(公告)日: 2019-04-23
- 发明人: Frank Thys , Hans Thielemans , Raf Nysen , Laurens Van Horenbeek
- 申请人: NIKON METROLOGY NV
- 申请人地址: BE Leuven
- 专利权人: NIKON METROLOGY NV
- 当前专利权人: NIKON METROLOGY NV
- 当前专利权人地址: BE Leuven
- 代理机构: Amster, Rothstein & Ebenstein LLP
- 优先权: EP14163889 20140408
- 国际申请: PCT/EP2015/057570 WO 20150408
- 国际公布: WO2015/155209 WO 20151015
- 主分类号: G01B5/012
- IPC分类号: G01B5/012 ; G01B21/04 ; G01B7/012 ; G01B11/00 ; G01R1/067
摘要:
The present invention provides a dimensional measurement probe unit (100) for attachment to a probe head (200) of a localizer (300), comprising: a measurement probe (150) for dimensional measurement of an object (400); a revolute joint (170) integrated into the measurement probe (150); and a probe unit interface (120) for repeated dismountable connection to a probe head (200) wherein the probe unit interface (120) is revolutely connected to the measurement probe (150) by the revolute joint (170).
公开/授权文献
- US20180172442A1 MEASUREMENT PROBE UNIT FOR METROLOGY APPLICATIONS 公开/授权日:2018-06-21
信息查询