In order to reduce a high frequency loss of a substrate-type optical waveguide without facilitating, in a low frequency domain, a reflection by an entrance end of a traveling-wave electrode, the substrate-type optical waveguide includes a coplanar line, provided on an upper surface of an upper cladding, which includes (i) a traveling-wave electrode connected to a P-type semiconductor region and (ii) an earth conductor connected to an N-type semiconductor region. The traveling-wave electrode and the earth conductor are provided so that a distance D therebetween decreases as a distance from an entrance end of the traveling-wave electrode increases.