Method of forming a semiconductor device with bump stop structure
Abstract:
A method for manufacturing semiconductor devices is provided. A protection layer is conformally deposited over a passivation layer such that the protection layer has a protrusion pattern that protrudes from a top surface of the protection layer. Further, a post-passivation interconnect structure (PPI) is conformally formed on the protection layer such that the PPI structure includes a landing pad region, a protrusion pattern conformal to the protrusion pattern of the protection layer, and a connection line electrically connected to the conductive pad. A solder bump is then placed on the landing pad region in contact with the protrusion pattern of PPI structure. A semiconductor device with bump stop structure is also provided. The protrusion pattern of the PPI structure serves as a bump stop that constrains a ball shift in the placement of the solder bump over the landing pad.
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