- 专利标题: Semiconductor device and method of formation
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申请号: US15852391申请日: 2017-12-22
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公开(公告)号: US10269902B2公开(公告)日: 2019-04-23
- 发明人: Meng-Yu Lin , Shih-Yen Lin , Si-Chen Lee
- 申请人: Taiwan Semiconductor Manufacturing Company Limited , National Taiwan University
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Cooper Legal Group, LLC
- 主分类号: H01L29/16
- IPC分类号: H01L29/16 ; H01L29/66 ; H01L29/10 ; H01L29/786 ; H01L29/423 ; H01L29/49
摘要:
A semiconductor device and method of formation are provided. The semiconductor device includes a substrate, a first active area over the substrate, a second active area over the substrate, a graphene channel between the first active area and the second active area, and a first in-plane gate. In some embodiments, the graphene channel, the first in-plane gate, the first active area, and the second active area include graphene. A method of forming the first in-plane gate, the first active area, the second active area, and the graphene channel from a single layer of graphene is also provided.
公开/授权文献
- US20180122909A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMATION 公开/授权日:2018-05-03
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