Invention Grant
- Patent Title: Advanced thermally compensated surface acoustic wave device and fabrication
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Application No.: US14782548Application Date: 2014-03-21
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Publication No.: US10270413B2Publication Date: 2019-04-23
- Inventor: Christophe Zinke , Eric Desbonnets
- Applicant: SOITEC
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1300824 20130408
- International Application: PCT/EP2014/055746 WO 20140321
- International Announcement: WO2014/166722 WO 20141016
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H03H3/08 ; H03H9/25
Abstract:
This disclosure relates to a method of fabrication of a surface acoustic wave device comprising the step (a) of providing a piezoelectric structure, the step (b) of providing a dielectric structure, wherein the step (b) comprises a step (b1) of metalizing the dielectric structure, and the method further comprising the step (c) of bonding the metalized dielectric structure to the piezoelectric structure.
Public/Granted literature
- US20160065162A1 ADVANCED THERMALLY COMPENSATED SURFACE ACOUSTIC WAVE DEVICE AND FABRICATION Public/Granted day:2016-03-03
Information query
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