- 专利标题: Via support structure under pad areas for BSI bondability improvement
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申请号: US16046183申请日: 2018-07-26
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公开(公告)号: US10283549B2公开(公告)日: 2019-05-07
- 发明人: Sin-Yao Huang , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
Some embodiments of the present disclosure relate to a method of forming an integrated chip. The method includes forming a first interconnect wire within a first inter-level dielectric (ILD) layer over a substrate. One or more vias are formed on the first interconnect wire and within a second ILD layer separated from the substrate by the first ILD layer. One or more additional vias are formed within the second ILD layer. Respective ones of the one or more vias have a larger size than respective ones of the one or more additional vias. A thickness of the substrate is reduced, and the substrate is etched to form a bond pad opening extending through the substrate to the first interconnect wire. A bond pad is formed within the bond pad opening and directly over the one or more vias.
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