Invention Grant
- Patent Title: System, a method and a computer program product for fitting based defect detection
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Application No.: US14279192Application Date: 2014-05-15
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Publication No.: US10290092B2Publication Date: 2019-05-14
- Inventor: Moshe Amzaleg , Nir Ben-David Dodzin
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G01N21/956

Abstract:
A system configured to detect defects in an inspection image generated by collecting signals arriving from an article, the system comprising a tangible processor which includes: (i) a distribution acquisition module, configured to acquire a distribution of comparison values, each of the comparison values being indicative of a relationship between a value associated with a pixel of the inspection image and a corresponding reference value; (ii) a fitting module, configured to fit to the distribution an approximation function out of a predefined group of functions; and (iii) a defect detection module, configured to: (a) set a defect detection criterion based on a result of the fitting; and to (b) determine a presence of a defect in the inspection image, based on the defect detection criterion.
Public/Granted literature
- US20150332451A1 SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR FITTING BASED DEFECT DETECTION Public/Granted day:2015-11-19
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