Invention Grant
- Patent Title: ReRAM MIM structure formation
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Application No.: US14928999Application Date: 2015-10-30
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Publication No.: US10290680B2Publication Date: 2019-05-14
- Inventor: Yoichiro Tanaka
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: Vierra Magen Marcus LLP
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00

Abstract:
Methods for improving the operation of a memory array by arranging a Metal-Insulator-Metal (MIM) structure between a word line and an adjustable resistance bit line structure are described. The MIM structure may correspond with a metal/ReRAM material/metal structure that is arranged between the word line and an intrinsic polysilicon region of the adjustable resistance bit line structure. In one example, a word line (e.g., TiN) may be arranged adjacent to a ReRAM material (e.g., HfOx) that is adjacent to a first metal (e.g., TiN) that is adjacent to the intrinsic polysilicon region. The first metal may comprise a metal, metal-nitride, or a metal-silicide. In another example, the word line may be arranged adjacent to a ReRAM material that is adjacent to a first metal (e.g., TiN) that is adjacent to a second metal different from the first metal (e.g., tungsten) that is adjacent to the intrinsic polysilicon region.
Public/Granted literature
- US20170125483A1 RERAM MIM STRUCTURE FORMATION Public/Granted day:2017-05-04
Information query
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