Invention Grant
- Patent Title: Multilayer structure, device using the same, method for producing the multilayer structure, and method for producing the device
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Application No.: US14407582Application Date: 2013-06-12
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Publication No.: US10290756B2Publication Date: 2019-05-14
- Inventor: Masakazu Nakaya , Noboru Higashida , Kentaro Yoshida , Ryoichi Sasaki , Manabu Shibata , Tatsuya Oshita
- Applicant: KURARAY CO., LTD.
- Applicant Address: JP Kurashiki-shi
- Assignee: KURARAY CO., LTD.
- Current Assignee: KURARAY CO., LTD.
- Current Assignee Address: JP Kurashiki-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-134897 20120614
- International Application: PCT/JP2013/003697 WO 20130612
- International Announcement: WO2013/187064 WO 20131219
- Main IPC: B32B7/12
- IPC: B32B7/12 ; H01L31/048 ; H01L31/049 ; H01L31/18 ; H01L33/56 ; H01L51/52 ; H01L51/56 ; B32B27/08 ; B32B27/30

Abstract:
Provided are a novel multilayer structure that can be used to protect a device and a device using the multilayer structure. The disclosed multilayer structure is a multilayer structure including a substrate and a barrier layer stacked on the substrate. The 3% strain tension of the substrate in at least one direction is at least 2000 N/m. The barrier layer contains a reaction product (R). The reaction product (R) is a reaction product formed by a reaction at least between a metal oxide (A) and a phosphorus compound (B). In an infrared absorption spectrum of the barrier layer in a range of 800 to 1400 cm−1, a wavenumber (n1) at which maximum infrared absorption occurs is in a range of 1080 to 1130 cm−1. A metal atom constituting the metal oxide (A) is essentially an aluminum atom.
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