- 专利标题: Distribution analyzing device and distribution analyzing method
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申请号: US14770113申请日: 2014-02-13
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公开(公告)号: US10295617B2公开(公告)日: 2019-05-21
- 发明人: Kenjiro Kimura
- 申请人: Kenjiro Kimura
- 申请人地址: JP Hyogo
- 专利权人: Kenjiro Kimura
- 当前专利权人: Kenjiro Kimura
- 当前专利权人地址: JP Hyogo
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2013-035177 20130225
- 国际申请: PCT/JP2014/000743 WO 20140213
- 国际公布: WO2014/129151 WO 20140828
- 主分类号: G01R33/10
- IPC分类号: G01R33/10
摘要:
A distribution analyzing device (20) includes: an obtaining unit (21) which obtains measurement data of a field measured, through a sensor sensing area, independently at each of rotation angles and at each of grid coordinate positions of the sensor sensing area; and a calculation unit (22) which calculates a distribution of the field from the measurement data, using an arithmetic expression obtained by deriving a target harmonic function, which indicates the distribution of the field, using a condition that a convolution of the target harmonic function and a shape function, which indicates a shape of a cross section of the finite sensor sensing area along a plane parallel to the measurement plane, is equal to a provisional harmonic function derived by solving the Laplace equation using the measurement data and a size of the sensor sensing area in a direction perpendicular to the measurement plane.