Invention Grant
- Patent Title: Interconnect structures for a security application
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Application No.: US15652594Application Date: 2017-07-18
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Publication No.: US10297546B2Publication Date: 2019-05-21
- Inventor: Erdem Kaltalioglu , Ronald G. Filippi, Jr. , Ping-Chuan Wang , Cathryn Christiansen
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/768 ; H01L21/308 ; H01L21/3065 ; H01L23/522 ; H01L21/306

Abstract:
Interconnect structures for a security application and methods of forming an interconnect structure for a security application. A sacrificial masking layer is formed that includes a plurality of particles arranged with a random distribution. An etch mask is formed using the sacrificial masking layer. A hardmask is etched while masked by the etch mask to define a plurality of mask features arranged with the random distribution. A dielectric layer is etched while masked by the hardmask to form a plurality of openings in the dielectric layer that are arranged at the locations of the mask features. The openings in the dielectric layer are filled with a conductor to define a plurality of conductive features.
Public/Granted literature
- US20190027433A1 INTERCONNECT STRUCTURES FOR A SECURITY APPLICATION Public/Granted day:2019-01-24
Information query
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