Invention Grant
- Patent Title: Split gate memory devices and methods of manufacturing
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Application No.: US15654293Application Date: 2017-07-19
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Publication No.: US10297604B2Publication Date: 2019-05-21
- Inventor: Chang-Ming Wu , Shih-Chang Liu , Chia-Shiung Tsai , Ru-Liang Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/11521 ; H01L29/788 ; H01L21/28 ; H01L29/423

Abstract:
Some embodiments of the present disclosure relate to method of forming a memory device. In some embodiments, the method may be performed by forming a floating gate over a first dielectric on a substrate. A control gate is formed over the floating gate and first and second spacers are formed along sidewalls of the control gate. The first and second spacers extend past outer edges of an upper surface of the floating gate. An etching process is performed on the first and second spacers to remove a portion of the first and second spacers that extends past the outer edges of the upper surface of the floating gate along an interface between the first and second spacers and the floating gate.
Public/Granted literature
- US20170317095A1 SPLIT GATE MEMORY DEVICES AND METHODS OF MANUFACTURING Public/Granted day:2017-11-02
Information query
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