Optical slit for a spectrometer that incorporates a wavelength calibration light source
Abstract:
An optical slit device that combines microelectromechanical design techniques, semiconductor laser technology, and micro-optics to provide a spectrometer entrance slit on a semiconductor substrate with integrated calibration light sources, which integrated light enters the entrance slit and is transmitted down the same optical path as a light source under test and by which the spectrometer can be wavelength calibrated in situ is disclosed.
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