- 专利标题: Piezoelectric sensor
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申请号: US15074430申请日: 2016-03-18
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公开(公告)号: US10305017B2公开(公告)日: 2019-05-28
- 发明人: Nobuhiro Kondo
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Kyoto
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2013-195408 20130920
- 主分类号: H01L41/04
- IPC分类号: H01L41/04 ; H01L41/047 ; H01L41/083 ; H01L41/311 ; H04R17/02 ; H01L41/053 ; H01L41/113 ; H04R1/08
摘要:
The present disclosure provides a highly sensitive piezoelectric sensor in which mixing of electromagnetic noise into signals output from a piezoelectric device is suppressed. The present disclosure provides a piezoelectric sensor including a piezoelectric device which includes a piezoelectric film having an insulating film and a piezoelectric layer stacked on one principal surface of the insulating film and a signal electrode layer stacked on one principal surface of the piezoelectric film, an amplifier electrically connected to the signal electrode layer, and a shield member which is not electrically connected to the signal electrode layer and is composed of a grounded conductor, wherein the piezoelectric film, the signal electrode layer, and the amplifier are accommodated inside the shield member.
公开/授权文献
- US20160204333A1 PIEZOELECTRIC SENSOR 公开/授权日:2016-07-14
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