Invention Grant
- Patent Title: Piezoelectric sensor
-
Application No.: US15074430Application Date: 2016-03-18
-
Publication No.: US10305017B2Publication Date: 2019-05-28
- Inventor: Nobuhiro Kondo
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Pearne & Gordon LLP
- Priority: JP2013-195408 20130920
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/047 ; H01L41/083 ; H01L41/311 ; H04R17/02 ; H01L41/053 ; H01L41/113 ; H04R1/08

Abstract:
The present disclosure provides a highly sensitive piezoelectric sensor in which mixing of electromagnetic noise into signals output from a piezoelectric device is suppressed. The present disclosure provides a piezoelectric sensor including a piezoelectric device which includes a piezoelectric film having an insulating film and a piezoelectric layer stacked on one principal surface of the insulating film and a signal electrode layer stacked on one principal surface of the piezoelectric film, an amplifier electrically connected to the signal electrode layer, and a shield member which is not electrically connected to the signal electrode layer and is composed of a grounded conductor, wherein the piezoelectric film, the signal electrode layer, and the amplifier are accommodated inside the shield member.
Public/Granted literature
- US20160204333A1 PIEZOELECTRIC SENSOR Public/Granted day:2016-07-14
Information query
IPC分类: