Invention Grant
- Patent Title: Bonding apparatus and method
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Application No.: US14157271Application Date: 2014-01-16
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Publication No.: US10312118B2Publication Date: 2019-06-04
- Inventor: Pei-Shan Wu , Yi-Ting Hu , Ming-Tan Lee , Yu-Lin Wang , Yuh-Sen Chang , Pin-Yi Shin , Wen-Ming Chen , Wei-Chih Chen , Chih-Yuan Chiu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H01L21/50

Abstract:
A bonding apparatus includes a wafer stage, a first chip stage, a first chip transporting device, a second stage and a second chip transporting device. The wafer stage is used for holding a wafer. The first chip stage is used for holding at least one first chip. The first chip transporting device is used for transporting the first chip from the first chip stage onto the wafer. The second chip stage is used for holding at least one second chip. The second chip transporting device is used for transporting the second chip from the second chip stage onto the wafer.
Public/Granted literature
- US20150200118A1 BONDING APPARATUS AND METHOD Public/Granted day:2015-07-16
Information query
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