Invention Grant
- Patent Title: Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same
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Application No.: US15557446Application Date: 2016-03-08
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Publication No.: US10317334B2Publication Date: 2019-06-11
- Inventor: Yong Jai Cho , Won Chegal , Hyun Mo Cho
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: McCoy Russell LLP
- Priority: KR10-2015-0034847 20150313
- International Application: PCT/KR2016/002287 WO 20160308
- International Announcement: WO2016/148422 WO 20160922
- Main IPC: G01J4/04
- IPC: G01J4/04 ; G01N21/21 ; G01B11/06 ; G01N21/84
Abstract:
The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.
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