Invention Grant
- Patent Title: Method and device for testing samples by means of an electron or ion beam microscope
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Application No.: US15257667Application Date: 2016-09-06
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Publication No.: US10319559B2Publication Date: 2019-06-11
- Inventor: Tim Dahmen , Niels de Jonge
- Applicant: Tim Dahmen , Niels de Jonge
- Agency: Klarquist Sparkman, LLP
- Priority: DE102015114843 20150904
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/26 ; H01J37/28 ; H01J37/10 ; H01J37/20
Abstract:
The disclosed subject matter relates to testing a sample by means of a particle beam microscope in which the sample is scanned in a point-wise manner by a focused beam of charged particles thereby generating imaging signals. The particle beam dose applied per scanning point is changed during scanning.
Public/Granted literature
- US20170154754A1 Method and Device for Testing Samples by Means of an Electron or Ion Beam Microscope Public/Granted day:2017-06-01
Information query
