- Patent Title: System and method for generating mask pattern and exposure system
-
Application No.: US15501497Application Date: 2016-05-06
-
Publication No.: US10324371B2Publication Date: 2019-06-18
- Inventor: Tailiang Li , Junmin Sun , Hongli Ding , Hongtao Guan
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201610158206 20160318
- International Application: PCT/CN2016/081258 WO 20160506
- International Announcement: WO2017/156842 WO 20170921
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/76 ; G03F7/20

Abstract:
The present disclosure provides a system for generating a mask pattern, a method for generating a mask pattern, and an exposure system. According to an embodiment of the present disclosure, the system for generating a mask pattern comprises: a mask pattern provision device configured to provide a mask pattern signal via a wired or wireless network; a mask pattern transmission device configured to process the mask pattern signal provided by the mask pattern provision device to generate mask pattern information, and to transmit the generated mask pattern information over a Radio Frequency Identification (RFID) signal; and a mask pattern generation device configured to generate a mask pattern corresponding to the mask pattern information based on the mask pattern information and display the generated mask pattern. The embodiments of the present disclosure allow interaction between the mask pattern provision device and the mask pattern generation device by utilizing IoT technique, such that the mask pattern generation device can display various different mask patterns on an e-ink screen, thereby providing a fast, convenient and low cost exposure scheme.
Public/Granted literature
- US20180088460A1 SYSTEM AND METHOD FOR GENERATING MASK PATTERN AND EXPOSURE SYSTEM Public/Granted day:2018-03-29
Information query