Invention Grant
- Patent Title: Imprinting apparatus, recording medium, and imprinting method
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Application No.: US15011915Application Date: 2016-02-01
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Publication No.: US10331028B2Publication Date: 2019-06-25
- Inventor: Takahito Nishimura , Jun Iijima
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
According to one embodiment, an imprinting apparatus is provided. The imprinting apparatus includes a controller that controls a resist drop position on a wafer to be imprinted with a pattern, using a first resist drop recipe corresponding to a first topography of the wafer.
Public/Granted literature
- US20170136683A1 IMPRINTING APPARATUS, RECORDING MEDIUM, AND IMPRINTING METHOD Public/Granted day:2017-05-18
Information query
