Invention Grant
- Patent Title: Compact manufacturing device, and inter-device transport system for production line
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Application No.: US15531962Application Date: 2015-12-01
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Publication No.: US10332768B2Publication Date: 2019-06-25
- Inventor: Shiro Hara , Hitoshi Maekawa
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Staas & Halsey LLP
- Priority: JP2014-243315 20141201
- International Application: PCT/JP2015/083828 WO 20151201
- International Announcement: WO2016/088786 WO 20160609
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687

Abstract:
A compact manufacturing device to automatically transport a wafer transport container. The compact manufacturing device comprises a processing chamber and a device front chamber provided inside a housing, a container mounting table provided in the housing to mount a substrate transport container accommodating a processing substrate, and a container transport mechanism. The container transport mechanism delivers the substrate transport container to the adjacent compact manufacturing device along a container transport path and/or receives the substrate transport container from adjacent compact manufacturing device along the container transport path when a plurality of the compact manufacturing devices are provided in parallel.
Public/Granted literature
- US20170309507A1 COMPACT MANUFACTURING DEVICE, AND INTER-DEVICE TRANSPORT SYSTEM FOR PRODUCTION LINE Public/Granted day:2017-10-26
Information query
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