Invention Grant
- Patent Title: Array substrate having partially oxidized source electrode, drain electrode and data line
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Application No.: US14436066Application Date: 2014-07-11
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Publication No.: US10338438B2Publication Date: 2019-07-02
- Inventor: Seungjin Choi , Heecheol Kim , Youngsuk Song , Seongyeol Yoo
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Womble Bond Dickinson (US) LLP
- Priority: CN201410130729 20140328
- International Application: PCT/CN2014/082023 WO 20140711
- International Announcement: WO2015/143796 WO 20151001
- Main IPC: H01L21/77
- IPC: H01L21/77 ; H01L21/02 ; H01L27/12 ; G02F1/1333 ; G02F1/1343 ; G02F1/1362
Abstract:
The embodiments of the invention disclose an array substrate, a manufacturing method thereof and a display device. Due to the fact that the surfaces of a source electrode, a drain electrode and a data line which are arranged on the same layer are provided with an oxide film which is formed after annealing treatment is conducted on the source electrode, the drain electrode and the data line, in the process that the pattern of a pixel electrode is formed on the source electrode, the drain electrode and the data line by the adoption of a composition technology, the oxide film can protect the source electrode and the data line under the oxide film from being corroded by an etching agent when the pattern of the pixel electrode is formed by etching, and the display quality of a display panel will not be affected.
Public/Granted literature
- US20170003553A1 ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE Public/Granted day:2017-01-05
Information query
IPC分类:
