- 专利标题: Holding assembly for substrate processing chamber
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申请号: US14846951申请日: 2015-09-07
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公开(公告)号: US10347475B2公开(公告)日: 2019-07-09
- 发明人: Kathleen Scheible , Michael Allen Flanigan , Goichi Yoshidome , Adolph Miller Allen , Christopher Pavloff
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Janah & Associates, PC
- 代理商 Ashok K. Janah
- 主分类号: H01J37/34
- IPC分类号: H01J37/34 ; H01L21/687 ; C23C14/34 ; C23C14/50
摘要:
A holding assembly for retaining a deposition ring about a periphery of a substrate support in a substrate processing chamber, the deposition ring comprising a peripheral recessed pocket with a holding post. The holding assembly comprises a restraint beam capable of being attached to the substrate support, the restraint beam comprising two ends, and an anti-lift bracket. The anti-lift bracket comprises a block comprising a through-channel to receive an end of a restraint beam, and a retaining hoop attached to the block, the retaining hoop sized to slide over and encircle the holding post in the peripheral recessed pocket of the deposition ring.
公开/授权文献
- US20150380223A1 HOLDING ASSEMBLY FOR SUBSTRATE PROCESSING CHAMBER 公开/授权日:2015-12-31
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