Invention Grant
- Patent Title: Holding assembly for substrate processing chamber
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Application No.: US14846951Application Date: 2015-09-07
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Publication No.: US10347475B2Publication Date: 2019-07-09
- Inventor: Kathleen Scheible , Michael Allen Flanigan , Goichi Yoshidome , Adolph Miller Allen , Christopher Pavloff
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Janah & Associates, PC
- Agent Ashok K. Janah
- Main IPC: H01J37/34
- IPC: H01J37/34 ; H01L21/687 ; C23C14/34 ; C23C14/50

Abstract:
A holding assembly for retaining a deposition ring about a periphery of a substrate support in a substrate processing chamber, the deposition ring comprising a peripheral recessed pocket with a holding post. The holding assembly comprises a restraint beam capable of being attached to the substrate support, the restraint beam comprising two ends, and an anti-lift bracket. The anti-lift bracket comprises a block comprising a through-channel to receive an end of a restraint beam, and a retaining hoop attached to the block, the retaining hoop sized to slide over and encircle the holding post in the peripheral recessed pocket of the deposition ring.
Public/Granted literature
- US20150380223A1 HOLDING ASSEMBLY FOR SUBSTRATE PROCESSING CHAMBER Public/Granted day:2015-12-31
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