Invention Grant
- Patent Title: Method and apparatus for x-ray microscopy
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Application No.: US15605957Application Date: 2017-05-26
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Publication No.: US10352880B2Publication Date: 2019-07-16
- Inventor: Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Srivatsan Seshadri , Alan Francis Lyon , David Vine
- Applicant: Sigray, Inc.
- Applicant Address: US CA Concord
- Assignee: Sigray, Inc.
- Current Assignee: Sigray, Inc.
- Current Assignee Address: US CA Concord
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: G21K7/00
- IPC: G21K7/00 ; G01N23/04 ; G01N23/20 ; A61B6/00 ; G21K1/02 ; H01J35/08

Abstract:
This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.
Public/Granted literature
- US20170261442A1 METHOD AND APPARATUS FOR X-RAY MICROSCOPY Public/Granted day:2017-09-14
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