Invention Grant
- Patent Title: Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure
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Application No.: US15804765Application Date: 2017-11-06
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Publication No.: US10356543B2Publication Date: 2019-07-16
- Inventor: Axel Thomsen
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Main IPC: H04R3/06
- IPC: H04R3/06 ; H04R19/00 ; H04R19/04 ; H04R29/00

Abstract:
A MEMS may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate, and a diaphragm configured to mechanically displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The diaphragm may comprise third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes mechanically displace relative to the backplate as the function of the sound pressure. The first and third electrodes may form a first capacitor, the second and fourth electrodes may form a second capacitor, and the first capacitor may be configured to sense a displacement of the diaphragm responsive to which the second capacitor may be configured to apply an electrostatic force to the diaphragm to return the diaphragm to an original position.
Public/Granted literature
- US20180152798A1 MICROELECTROMECHANICAL SYSTEMS MICROPHONE WITH ELECTROSTATIC FORCE FEEDBACK TO MEASURE SOUND PRESSURE Public/Granted day:2018-05-31
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