Invention Grant
- Patent Title: Pressure sensor capable of suppressing dispersion in the initial load of pressure
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Application No.: US15222166Application Date: 2016-07-28
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Publication No.: US10359326B2Publication Date: 2019-07-23
- Inventor: Ryoichi Toyoshima , Keizo Toyama , Hirokazu Ohdate , Masayuki Iwase
- Applicant: NIPPON MEKTRON, LTD.
- Applicant Address: JP Tokyo
- Assignee: NIPPON MEKTRON, LTD.
- Current Assignee: NIPPON MEKTRON, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2015-187147 20150924
- Main IPC: G01L1/00
- IPC: G01L1/00 ; G01L5/00 ; G01L1/20

Abstract:
This invention provides a pressure sensitive element capable of suppressing dispersion in the initial load for pressure sensing among the sensor electrodes or among the pressure sensors. The pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer. The pressure sensing film is arranged opposing to the sensor electrode. The insulating layer has an opening and is provided between the support substrate and the pressure sensing film. At least a part of an opening edge of the opening is fallen on the sensor electrode. An exposed part as a part of the sensor electrode is exposed inside the opening, while leaving a buried part as the other part of the sensor electrode buried under the insulating layer.
Public/Granted literature
- US20170089778A1 PRESSURE SENSITIVE ELEMENT AND PRESSURE SENSOR Public/Granted day:2017-03-30
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