First electrodes are formed on an insulation surface in such a manner that the adjacent first electrodes are connected in a first direction and are separated in a second direction intersecting the first direction. Second electrodes are formed on an insulation surface in such a manner that the adjacent second electrodes are connected in the second direction and are separated in the first direction. Third electrodes are formed in regions in which the third electrodes overlap with the first electrodes and do not overlap with the second electrodes in such a manner that the adjacent third electrodes are connected in the second direction and are separated in the first direction. A flexible insulation layer is formed between the first electrodes and the third electrodes. An area of each of the third electrodes is less than an area of each of the first electrodes.