Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16043166Application Date: 2018-07-24
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Publication No.: US10361209B2Publication Date: 2019-07-23
- Inventor: Ying-Chiao Wang , Li-Wei Feng , Chien-Ting Ho , Wen-Chieh Lu , Li-Wei Liu
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Agent Winston Hsu
- Priority: CN201710137051 20170309
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A manufacturing method of a semiconductor memory device includes following steps. Bit line structures and storage node contacts are formed on a semiconductor substrate. A first sidewall spacer is formed on sidewalls of each bit line structure. A conductive layer covering the bit line structures, the first sidewall spacer, and the storage node contacts is formed. A first patterning process is preformed to the conductive layer for forming stripe contact structures. Each stripe contact structure is elongated in the first direction and corresponding to the storage node contacts. The first sidewall spacer at a first side of each bit line structure is exposed by the first patterning process. The first sidewall spacer at a second side of each bit line structure is covered by the stripe contact structures. The first sidewall spacer exposed by the first patterning process is removed for forming first air spacers.
Public/Granted literature
- US20180350817A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-12-06
Information query
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