- Patent Title: Linear evaporation source and deposition apparatus having the same
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Application No.: US15884236Application Date: 2018-01-30
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Publication No.: US10364488B2Publication Date: 2019-07-30
- Inventor: Min-Gyu Seo , Sang-Jin Han , Cheol-Lae Roh , Jae-Hong Ahn
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2009-126143 20091217
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/26 ; C23C16/448

Abstract:
A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.
Public/Granted literature
- US20180155831A1 LINEAR EVAPORATION SOURCE AND DEPOSITION APPARATUS HAVING THE SAME Public/Granted day:2018-06-07
Information query
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